By Robert P. Donovan

ISBN-10: 0585403953

ISBN-13: 9780585403953

ISBN-10: 0824703804

ISBN-13: 9780824703806

Spotting the necessity for better keep watch over measures within the production means of hugely sensitized semiconductor know-how, this sensible reference presents in-depth and complicated remedy at the origins, systems, and disposal of quite a few contaminants. It makes use of modern examples according to the most recent and processing gear to demonstrate formerly unavailable effects and insights in addition to experimental and theoretical developments.

Ensures the right kind equipment essential to meet the criteria validated within the 1997 nationwide know-how Roadmap for Semiconductors (NTRS)!

Summarizing up to date keep watch over practices within the undefined, Contamination-Free production for Semiconductors and different Precision Products:

  • Details the physics and chemistry in the back of the mechanisms resulting in contamination-induced mess ups
  • Considers debris and molecular contaminants, together with the full spectrum of mass-based contaminants
  • Outlines basic infection difficulties and goal keep an eye on degrees
  • Reveals and gives ideas to insufficient parts of dimension potential and regulate expertise
  • Clarifies major difficulties and judgements dealing with the by way of interpreting NTRS criteria and illness mechanisms

    Containing over seven hundred literature references, drawings, pictures, equations, and tables, Contamination-Free production for Semiconductors and different Precision items is a necessary reference for electric and electronics, instrumentation, procedure, production, improvement, infection keep watch over and caliber engineers; physicists; and upper-level undergraduate and graduate scholars in those disciplines.

  • Show description

    Read or Download Contamination-Free Manufacturing for Semiconductors and Other Precision Products PDF

    Best electronics: radio books

    Patrick J. Sweeney II's CompTIA RFID+ Study Guide (Exam RF0-101, includes CD-ROM) PDF

    SynopsisThis accomplished examine advisor completely covers the CompTIA RFID+ examination, the single certification provided for radio frequency id (RFID), the expertise that's speedily becoming more popular and is anticipated to totally change bar codes. Your examine will specialize in interrogation area fundamentals, trying out and troubleshooting, criteria and rules, tag wisdom, layout choice, set up, web site research, RF physics, and RFID peripherals.

    Download PDF by David Sutton: Textbook of Radiology & Imaging

    This e-book goals to supply an entire and complete postgraduate textbook for all radiological trainees taking specialist examinations world wide. This variation has elevated emphasis at the more recent imaging modalities and integrates all new imaging modalities with the organ / procedure chapters.

    Download e-book for iPad: Gastrointestinal Imaging: The Requisites (Requisites in by Robert D. Halpert

    This concise, functional source covers all of modern day need-to-know info in gastrointestinal imaging. .. in an extremely undemanding layout. simply because it is so compact, clinically orientated, and straightforward to learn, this new quantity within the standards sequence is a perfect examine device in addition to a handy reference for perform.

    Additional info for Contamination-Free Manufacturing for Semiconductors and Other Precision Products

    Sample text

    Figure 4 shows that Mie scattering intensity also oscillates with size parameter. For values of α ≥ 6, scattering intensity at any given scattering angle is not a unique function of particle diameter. An initial reaction to this dependence is that optical scattering, in spite of its high size-sensitivity and resolution, may not be a suitable basis for uniquely sizing particles. However, optical particle counters are designed to collect light scattered over a range of scattering angles, and this averaging effect results in essentially a monotonic relationship between particle size and the intensity of the scattered light (Fig.

    3 µm can be captured and counted by the impactor method. When operated at subatmospheric pressures, the cutoff diameter for particle collection is even lower. SEM samples can also be collected electrically in a point-to-plane electrostatic precipitator. This device captures particles by the mechanism of electrophoresis—the drift of electrically charged particles in an electric field [see Chap. 6, Eq. (16)]. A sharpened electrode, protruding into the aerosol flow Figure 8 Cross section of an inertial impactor.

    For values of α ≥ 6, scattering intensity at any given scattering angle is not a unique function of particle diameter. An initial reaction to this dependence is that optical scattering, in spite of its high size-sensitivity and resolution, may not be a suitable basis for uniquely sizing particles. However, optical particle counters are designed to collect light scattered over a range of scattering angles, and this averaging effect results in essentially a monotonic relationship between particle size and the intensity of the scattered light (Fig.

    Download PDF sample

    Contamination-Free Manufacturing for Semiconductors and Other Precision Products by Robert P. Donovan


    by Thomas
    4.2

    Rated 4.04 of 5 – based on 22 votes